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„Ceramic AM enables 500 mm dual-channel for high-speed PEALD and ALE in the same chamber“

As semiconductor manufacturers move towards larger substrates and faster atomic-scale processes, the components inside wafer production tools must scale up without compromising precision. Plasway-Technologies, Alumina Systems and Lithoz have developed a 500 mm dual-channel alumina gas distribution ring for Plasway-Technologies’ FAST Atomic Layering Process (FALP) platform. Produced using Lithoz’s ceramic Additive Manufacturing, the ring enables …

„Cleaner semiconductor etching: Bosch Advanced Ceramics‘ two-part AM injector produced with Lithoz technology“

Semiconductor manufacturers increasingly rely on components that can withstand extreme plasma environments while delivering tighter process control and near-zero contamination. To meet these demands, Bosch Advanced Ceramics and Lithoz have transformed a previously two-part injector design into a fully integrated single ceramic component using ceramic Additive Manufacturing. By pairing high-purity alumina with precision AM technology,complex …