3D Printing for Semi­conductors

This 15“ diameter alumina gas distribution ring was manufactured by Alumina Systems and designed by Plasway Technologies using Lithoz LCM technology. Alumina is used to ensure a constant gas flow and pressure even when using reactive gases. Capitalizing on the design freedom of Lithoz LCM technology, the part manufactured performed more effectively than conventionally produced rings thanks to a more complex design, allowing for an exceptionally lightweight and thinwalled structure. Material usage was reduced in key areas and the part could be manufactured onsite, making digital warehouses a reality and saving on storage costs.

In semiconductor production, precise gas control is crucial for consistent layer quality and exact structuring. Gas balancers and gas injection nozzles perform different tasks in controlling the gas flow to ensure repeatability and maximize process performance.

A gas distribution nozzle made of yttria (yttrium oxide, Y₂O₃) is a high-performance component used in semiconductor manufacturing, particularly in plasma etching, chemical vapor deposition (CVD) and atomic layer deposition (ALD). These nozzles ensure uniform gas distribution over the semiconductor wafers during critical process steps.

Our high-end 3D printed alumina gas balancer offers a revolutionary solution for precise gas distribution in the semiconductor industry. By uniquely combining the outstanding chemical and thermal resistance of aluminum oxide with the flexible design freedom and accuracy of 3D printing, this component enables a uniform and stable gas supply - even under demanding process conditions. Specifically designed for modern production lines, the gas balancer supports maximum process stability and extended service life, especially in applications such as plasma etching, CVD and ALD. Thanks to its innovative design, which would not be feasible with conventional production methods, it ensures improved efficiency and quality in semiconductor production and gives manufacturers a clear competitive advantage.

With clear growing demand for ceramic 3D printing at an industrial scale across industries, the success of Lithoz’s partners and technology in serial production is becoming ever more visible. Lithoz will showcase the arrival of “The Ceramic 3D Factory”, uniting Lithoz technology and service bureaus all over the world in one global network for interconnected serial production across fields such as semiconductor production, aerospace and more. This global “Ceramic 3D Factory” network is strengthened by the new CeraControl software, which allows for up to 100 globally interconnected CeraFab S65 3D printers. With consistently reproducible precision, Lithoz is ushering in the era of globally connected ceramic printer farms — from semiconductor manufacturing to aerospace and medical technology.

Diese Hochdruckdüse mit engstmöglichem Auslass ist mit LithaLox 360 gedruckt und wurde von der Steinbach AG für einen Kunden aus der Automotive industry gefertigt. Die ursprüngliche Anwendung bestand aus mehreren metallischen Einzelteilen, was zu einem deutlich höheren Gewicht und einem massiven Querschnitt von 50 mm führte.

Steinbach AG redesigned and optimized the entire component to make use of the LCM technology’s full potential in precision and material strength. Through significantly more intricate inner structures, an extremely narrow outlet, and much smoother surfaces in one single 3D-printed piece, the entire construction could be miniaturized by 60%. Thanks to the excellent corrosion resistance, the alumina part also showed a significantly lower degree of wear compared to the previous metal component.

LithaLox 360 ist dank einer modifizierten Binderformulierung und einem Reinheitsgrad von 99,8 % speziell für die Gestaltung hochauflösender Merkmale optimiert. Mit diesem Aluminiumoxid lassen sich selbst dünnste Kanäle, engste Gitterstrukturen und feinste Löcher in miniaturisierten Bauteilen realisieren. So lassen sich beispielsweise Röhren mit einem Durchmesser von weniger als 200 μm und Stege unter 100 μm Dicke herstellen. Bauteile aus Alumina sind elektrisch isolierend und durchstoßfest und eignen sich daher für eine Vielzahl von Anwendungen, etwa in der Halbleiterindustrie oder für Düsen in der Medical.

This 3D-printed mixing nozzle, printed by Bosch Advanced Ceramics, is used in rotors for mini-pumps. As a part being used in chemical applications, the corrosive resistance of alumina as a ceramic material makes it the top material for the job. The complex guiding blades and small holes were also easily achieved using the geometrical freedom of 3D printing, with the diameter of the holes being just 0.2 mm allowing for an increased number of holes and therefore improving mixing performance.

This functional part was designed and 3D printed by Steinbach AG from the flexible alumina material LithaLox 360. It was part of a joint development project to optimize the cleaning of the highly complex structures that can be achieved with this newly developed alumina slurry, which is able to create the thinnest channels, narrowest lattice structures and finest holes in miniaturized components.

The heat exchanger’s characteristic features are its narrowly positioned cooling fins of only 0.45 mm edge widths at a depth of 3.5 mm measured from the fin’s edges to the tube’s structure. The diameter of the inner tube forming the axis is only 2 mm, whilst the connected central struts have a thickness of a mere 0.45 mm.