„Cleaner semiconductor etching: Bosch Advanced Ceramics‘ two-part AM injector produced with Lithoz technology“

Semiconductor manufacturers increasingly rely on components that can withstand extreme plasma environments while delivering tighter process control and near-zero contamination. To meet these demands, Bosch Advanced Ceramics and Lithoz have transformed a previously two-part injector design into a fully integrated single ceramic component using ceramic Additive Manufacturing. By pairing high-purity alumina with precision AM technology,
complex internal geometries could be unlocked, enhancing reliability and performance for advanced wafer production.

Read the full article by PIM here.